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Sublimation & Purification Equipment
■Feature
This equipment carries out sublimation and purification of materials such as luminous materials for organic EL
displays in order to increase their purity. By utilizing evaporation (sublimation) temperature, only luminous
substance is sublimated from the mixture of luminous substance and impurities in vacuum state. It is then
extracted in high-purity condition after re-condensed in low-temperature section. Since heat is applied in vacuum
state, processing temperature may be low. It is also possible to restrain electricity needed for heating as well as to
prevent deterioration of luminous substance.
Various types of equipment from small-type for experimentation to large-type for mass-production are available
for selection.
■Specification
| Type | VQ-0510 | VQ-3020 |
|---|---|---|
| Temperature | R.T.～600℃ | |
| Exhaust devices | Turbo-molecular pump+Dry pump | Diffusion pump + Oil rotary pump + Oil mist separator + Oil-back prevention filter |
| Vacuum degree | 9×10-3Pa | 9×10-5Pa |
| Gas flow (option) | Ar3～30cc/min. | |
| Heating | 2 zones | 3 zones |
| Heater | Ceramic fiber heater | |
| Chamber | φ60quartz L1000 | φ274quartz L1960 |
| Collection pipe | φ50quartz L100*3 | φ270quartz L300*6 |
| Cold trap | Immersion type cooler | Made of liquid nitrogen trap SUS |
| Power supply | AC200V 1φ 3kW | AC200V 3φ 28.5kW |
| Outside dimension W*D*H | 1200×700×1400 | 1550×1800×2685 |
| Weight | 400kg | 900kg |
| Cooling water (city water) |
1L/min. | 15L/min. |