High temperature Annealing Equipment (Vacuum Type/Pressurizing)

■Feature

This equipment is annealing equipment that can be used in both vacuum and pressurizing state. It delivers excellent temperature uniformity especially for glass substrates arranged at a narrow pitch. It is also capable of making the ripening temperature uniform during temperature fall.

High temperature Annealing Equipment (Vacuum Type/Pressurizing)

■Specification

Type Type Name Vacuum /Pressure Temperature Atmosphere Effective Diameter * Depth
Vacuum VA-6550H 20Pa – Atmospheric Pressure RT～450℃ AIR N2 Ar φ550×550
VA-85700H φ750×750
VA-110100H φ1000×1000
VA-130120H φ1200×1200
Pressurizing vacuum HPVA-6550H 1.3Pa～0.5MPa RT～500℃ φ550×550
HPVA-85700H φ750×750
HPVA-110100H φ1000×1000
HPVA-130120H φ1200×1200
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