High temperature Annealing Equipment (Vacuum Type/Pressurizing Vacuum Type)
Feature
This equipment is annealing equipment that can be used in both vacuum and pressurizing state.
It delivers excellent temperature uniformity especially for glass substrates arranged at a narrow pitch.
It is also capable of making the ripening temperature uniform during temperature fall.
Specification
| Type | Type Name | Vacuum /Pressure | Temperature | Atmosphere | Effective Diameter * Depth |
| Vacuum | VA-6550H | 20Pa – Atmospheric | RT – 450 degrees C | AIR N2 Ar | φ550*550 |
| VA-85700H | φ750*750 | ||||
| VA-110100H | φ1000*1000 | ||||
| VA-130120H | φ1200*1200 | ||||
| Pressurizing vacuum | HPVA-6550H | 1.3Pa – 0.5MPa | RT – 500 degrees C | φ550*550 | |
| HPVA-85700H | φ750*750 | ||||
| HPVA-110100H | φ1000*1000 | ||||
| HPVA-130120H | φ1200*1200 |
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